-40%
TEL Tokyo Electron MU SPA CE T2 Chamber CF,CN,-,CO Radical Process Reactor Spare
$ 13202.74
- Description
- Size Guide
Description
TEL Tokyo Electron MU SPA CE T2 Chamber CF,CN,-,CO Radical Process Reactor SpareInventory # A-17218
Model No: MU SPA CVD CE T2 Chamber
Removed from a TEL Tokyo Electron Trias CF,CN,-,CO Radical Process Reactor System
Installed Components
Mitsubishi Turbomolecular Pump Part No: FT-10010-W211
Tokyo Kagaku Leak Sensor Part No: RS2000CA (Qty.2)
VAT Valve Part No: 65046-PA52-ASK1/0010
VAT Adaptive Pressure Controller Part No: PM-7
This TEL Tokyo Electron Trias MU SPA CVD CE T2 Chamber is used working surplus. The chambers process is not marked on the unit but was removed from a TEL Tokyo Electron Trias CF,CN,-,CO Radical Process Reactor System but no further process details are known. The physical condition is good, but there are signs of previous use and handling.
Sale Details
Item Condition:
Used Working, 90 Day Warranty
Estimated Packed Shipping Dimensions:
L x W x H = Requires Freight Shipping
Only items pictured are included:
If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
For items with multiple quantities:
The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
Items are sold with a
90-Day Satisfaction Guarantee
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